UV Applications in Microelectronics

With over 8,500 installations in microelectronics fabs globally, Aquafine® Ultraviolet light (UV) systems have a strong global performance record and are trusted by the biggest brands in the industry. We understand the challenges faced in the design and construction of a system for microelectronics production and have the expertise to help with how to integrate with existing systems and ensure optimal performance. Ultrapure water (UPW) is required at nearly every stage of the microelectronics manufacturing process and is an essential resource to the microelectronics and semiconductor industries. Aquafine UV Systems commonly perform three functions in producing ultrapure water - microbial inactivation via UV Treatment, TOC (total organic carbon) reduction and chlorine and chloramines reduction. The state-of-the-art water treatment systems are engineered to focus the power of concentrated UV light using specially designed Aquafine Colorguard UV lamps which are recognized in the industry for unsurpassed performance and reliability.

Typical UV Microelectronics Installation

A microelectronics water system could have several locations where UV equipment would be installed. Some typical locations would be post-carbon filter and pre-RO (reverse osmosis). When installed downstream of the carbon bed and/or directly upstream of the RO unit, a UV system can significantly reduce the microbial counts by inactivating the microbes present in the influent stream. Inactivation is also recommended for the process distribution loop and pre-storage tank.

Microelectronics Process Diagram

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Aquafine UV Systems for the Microelectronics Market

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Avant Series

Compact, skid-mounted system for flexible, low-footprint installation.

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OptiVenn Series

High-performance, cost-effective system for mid-flow applications.